Problem: The robot was kept waiting because of the long time required from image input to positioning output. This made it impossible to increase system throughput.
The FZM1 Solution: Using a high-speed Camera and faster image processing achieved high-speed processing. By further combining an OMRON Servo Drive and Position Control Unit that support EtherCAT communications, the time from inputting the image to starting the servo was greatly minimized.
Height Measurement Prior to IC Package Sealing
Wafer Thickness Measurement