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Multi-Point
Measurement with Calculation Functions
Use of the ZX-CAL2 Calculating Unit
makes it easy to configure inspection systems requiring outer diameter
(A-B) or width (A+B) calculations.

Remote (External)
Reference Light Intensity Setting (Use ZX-LDA[]1-(N)-01)
The reference light intensity can be set
to cancel measurement errors due to the effects of paper dust and
other matter when there is no sensing object present. This enables
high-speed meandering control.

"Front" APC Function
Front APC (Auto Power Control) reduces
the effect of light reflecting from wafers. Ideal for high-precision,
high-speed orientation flat positioning.

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