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OMRON IA Global

 
Semiconductor Industry Solutions using Omron Sensing & Control

Conveyance

Wafer Carrier/Reticle Management

 

Wafer Level Management for Small Lot Production

 

Industry Solutions

Case Studies :: Semiconductor Industry Solutions :: Conveyance

 

CIDRW (Carrier ID Reader/Writer) Improves Wafer Carrier / Reticle Management

Omron's Product:

V640 Series

Electromagnetic Inductive RFID System for Semiconductor Industry

  • Conforms to SEMI E 15.1, E4, E99, so R&D investment can be reduced.
  • Provides industry’s highest functionality and performance with a wide range of variety.

  • Reads/Writes data embedded in a glass single/multiple transponder where long distance communication range up to 120 mm is available.

Wafer Carrier Management: Unlike production control systems that uses bar codes, repeated exchanges with the host are not necessary, allowing for a simpler production program and system. Reticle Control: The reticle stored in the pod can be checked and identified by reading the information in the ID Tag mounted to the pod.

 

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