In-plane Uniform Control to Improve Yield | Malaysia

Malaysia

Semiconductor Industry Solutions using Omron Sensing & Control



	Implementation of Safety Solution in Control System
	Omron Provides Total Safety Solution

	Redundancy System in Utility Equipment
	No.1 Line Up Liquid Leakage Detection Sensor to Solve Your Application
	A New Handy Reader Capable of Reading Directly Marked Codes

	CIDRW Improves Wafer Carrier/Reticle Management
	Effective Wafer Level Management for Small Lot Production

	High-Precision Displacement Measurement through a View Port
	High-Precision Positioning that is Not Influenced by Temperature or View Port Degradation
	Open Network Controller Enables Collection of Process Data
	Improvement on Efficiency of Semiconductor Manufacturing Process
	SYSMAC SPU Allows for Faster System Start-up
	Loop Controller Allows High Speed and High Accuracy Analog Process Control
	Omron's Gradient Temperature Control Algorithm Provides Wafer Heating Uniformity
	In-plane Uniform Control to Improve Yield
	Multi-point Uniform Temperature Control by GTC Algorithm
	Harmonizing Flexibility, Speed, and Advanced Motion Control Operations
	Accelerate Global Operation by High-speed and Multi-vendor Field Network System
	Space, Wiring and Setting Saving Controller with High Reliability

	Stable Detection of Glass Substrate
	High Precision and Stability at Nano-meter Level
	Ideal for Large-size LCD Panel Stick-out Detection
	High Precision and Stable Alignment of Images

	Power Supply with Improved Reliability!
	S8M Provides Safety on the Secondary DC Circuit
	S8VM Offers New Undervoltage Alarm Function

Omron's Unique Idea "Gradient Temperature Control Algorithm" Realizes In-plane Uniform Control to Improve Yield
Omron's Product:	• EJ1G Modular Temperature Controller

Gradient temperature control algorithm enhances FPD and wafer quality with improved surface uniformity.
Simple programless communication enables connection to PLC without special programs.
Small modular construction with multiple inputs and a detachable terminal block reduces design and assembly times.

• Effects of Gradient Temperature Control

• Greater Quality with Uniform In-plain Temperature Control

Both uniform in-plain control and user-set temperature distribution are possible.

Traditional temperature control: Inconsistent temperature distribution with deviations in thermal processing; Gradient temperature control: Uniform temperature distribution.

Effective thermal processing range and high quality achieved for entire area.

• Conceptual Image

Ladder-less connection with PLC

• Application Example

Gradient temperature control supports uniform multi-stage furnace control!

Uniform surface control in a multi-level furnace.

Omron's Unique Idea "Gradient Temperature Control Algorithm" Realizes In-plane Uniform Control to Improve Yield